TUUMU in the future
TUUMU sensors play an increasingly important role in the field of science and technology, industrial and agricultural production as well as daily life. The increasing demands of human society for sensors are the powerful driving force to develop sensor technology while the rapid advancement in modern science and technology provides a strong backing for TUUMU. With the development of technology, TUUMU sensors are constantly updating and developing.
1. Development of new sensors
New sensors generally include the advantages such as adoption of new principle, filling up sensor gap and biomimetic sensor which are interconnected between them. The working mechanism of sensor is based on a variety of effects and laws, which inspires people to further explore the sensitive materials with new effects and thus develop new physical property type sensors with new principles. It is an important way to develop the sensors with high performance, multifunction, lower cost and miniaturization. Structure type sensors developed earlier and currently have become increasingly mature. Generally speaking, the structure is complex, the volume is larger and the price is on high side for structure type sensors. Physical property type sensors are generally on the contrary with many attractive advantages but coupled with insufficient development in the past. The countries in the world have invested a lot of manpower and material resources in terms of physical property type sensors to strengthen the research thus making it a noteworthy development trend. Among which the low-sensitivity threshold sensors developed with quantum mechanical effects have been used for detecting weak signals, and it is one of new development trends.
2. Integration, multi-functionalization and intelligence
The integration of sensor includes two definitions: One is the paralleling of multicomponent with the same function, i.e. the components of individual sensor of same type are arranged on the same plane with integrated process and the components arranged in one dimension are linear sensors. This is the case with CCD image sensor. Another definition is multifunctional integration, i.e. the sensor is assembled with the functions of amplification, computing and temperature compensation into a single device.
With the development of integrated technologies, various types of hybrid integrated and monolithic integrated pressure sensors have appeared in succession, and some of them have become merchandises. Integrated pressure sensors have piezoresistive and capacitive types of which piezoresistive integrated sensors have been in rapid development and wide application.
The multi-functionalization of sensor is also one of its development direction. A typical example of so-called multi-functionalization, the monolithic silicon multidimensional force sensor developed in the research and development center at an American university can measure three line speed, three centrifugal acceleration (angular velocity) and three angular acceleration. The main components are the monolithic silicon structure composed of four cantilevers properly designed and installed in a substrate, the nine piezoresistive sensitive components properly arranged on each cantilever. Multi-functionalization can not only reduce production cost, size, and can effectively improve the performance index such as stability and reliability of sensors.
Multiple parameters can be measured simultaneously when integrating the sensing elements with different functions but also the measurement results of these parameters can be comprehensively treated and evaluated to reflect the overall state of the system under test. Can also be seen from above that integration brings many new opportunities to solid-state sensor but also it is the foundation of multi-functionalization.
Due to the combination of sensors and microprocessors, the sensors not only have detection function but also artificial intelligence such as information processing, logical judgment, self-diagnosis and "thinking", which is called sensor intelligence. By means of semiconductor integrated technology, a large-scale integrated intelligent sensor is produced when the sensor part and signal preprocessing circuit, input and output interfaces and microprocessor are fabricated on the same chip. So to say that intelligent sensors is the product of sensor technology combined with large scale integrated circuit and its realization will depend on the improvement and development of sensor technology and the technological level of semiconductor integration. Such sensors have the advantages of multi-function, high performance, small size, suitable for mass production and ease of use. It is safe to say that it is one of the important directions for the development of sensors.
3. Development of new materials
Sensor material is the important foundation for sensor technology and important support of sensor technology upgrading. With the advancement of material science, sensor technology is becoming more mature with more growing kinds. In addition to the early used semiconductor and ceramic materials, the development of optical fiber and superconducting materials provides a material basis for the development of sensor. For example, modern sensors such as infrared sensors, laser sensors, fiber optic sensors have been developed according to the characteristics of many semiconductor materials liable to miniaturization, integration, multi-functionalization and intelligence as well as semiconductor photo-thermal detectors with high sensitivity, high precision and non-contact; Sensitive materials such as ceramic materials and organic materials have been developed rapidly. They can be sintered with high precision molding mixing raw materials using different formulations based on precise blending chemical compositions to form sensitive materials which have identification function to one or certain types of gas for making new gas sensors. In addition, organic polymer sensitive materials are new type of sensitive materials which have received great concern in recent years with utilization potentiality and can be made into thermosensitive, photosensitive, gas-sensitive, humidity-sensitive, force-sensitive, ion-sensitive and bio-sensitive sensors. The continuous development of sensor technologies have also promoted the development of newer materials, such as nano- materials. U.S. NRC has developed nano- ZrO2 gas sensors to control exhaust emissions of motor vehicle with perfect effects of purifying environment and broader application prospect. The sensors produced with nanomaterials have huge interface and can provide a lot of gas channels with small on-resistance so they are beneficial to the miniaturization of sensors. With continuous progress of science and technology, there will be more new materials.
4. Adoption of new technology
The development of new sensors is inseparable from the adoption of new technology. New technology has a wide range of meaning. It mainly refers to the microfabrication technique particularly correlated to the development of new sensor. This technique is also known as micro-machining process technology and develops together with integrated circuit technology in recent years. It is the microelectronic processing technology used for ion beam, electron beam, molecular beam, laser beam and chemical etching and currently widely used in the field of sensor, such as sputtering, vapor deposition, plasma etching, chemical vapor deposition (CVD), epitaxy, diffusion, etching and photoetching. So far a large number of sensors have been put into production and used in the world using the above-mentioned technology.
5. Intelligent material
Intelligent materials refers to the man-made materials which are developed with the design and control of physical, chemical, mechanical, electrical parameters of materials so they have the biological characteristics or are superior to the properties of biological materials. Some people think that the materials with the following functions can be called intelligent materials: adaptive function to the environment through judgment; self-diagnostic function; self-healing function; self-enhancement function (or time base function).
The most prominent feature of biological materials is their time base function, so this type of sensor has the differential characteristic sensitive to variational portion. On the contrary, if it is in an environment for long time and accustomed to this environment, its sensitivity will decrease. Generally, it can adapt to the environment and adjust its sensitivity. In addition to biological materials, the most striking intelligent materials are the polymer of shape memory alloy, shape memory ceramic and shape memory. The exploration of intelligent materials is just beginning and we believe there will be a great development in the near future.
TUUMU sensors play an increasingly important role in the field of science and technology, industrial and agricultural production as well as daily life. The increasing demands of human society for sensors are the powerful driving force to develop sensor technology while the rapid advancement in modern science and technology provides a strong backing for TUUMU. With the development of technology, TUUMU sensors are constantly updating and developing.
1. Development of new sensors
New sensors generally include the advantages such as adoption of new principle, filling up sensor gap and biomimetic sensor which are interconnected between them. The working mechanism of sensor is based on a variety of effects and laws, which inspires people to further explore the sensitive materials with new effects and thus develop new physical property type sensors with new principles. It is an important way to develop the sensors with high performance, multifunction, lower cost and miniaturization. Structure type sensors developed earlier and currently have become increasingly mature. Generally speaking, the structure is complex, the volume is larger and the price is on high side for structure type sensors. Physical property type sensors are generally on the contrary with many attractive advantages but coupled with insufficient development in the past. The countries in the world have invested a lot of manpower and material resources in terms of physical property type sensors to strengthen the research thus making it a noteworthy development trend. Among which the low-sensitivity threshold sensors developed with quantum mechanical effects have been used for detecting weak signals, and it is one of new development trends.
2. Integration, multi-functionalization and intelligence
The integration of sensor includes two definitions: One is the paralleling of multicomponent with the same function, i.e. the components of individual sensor of same type are arranged on the same plane with integrated process and the components arranged in one dimension are linear sensors. This is the case with CCD image sensor. Another definition is multifunctional integration, i.e. the sensor is assembled with the functions of amplification, computing and temperature compensation into a single device.
With the development of integrated technologies, various types of hybrid integrated and monolithic integrated pressure sensors have appeared in succession, and some of them have become merchandises. Integrated pressure sensors have piezoresistive and capacitive types of which piezoresistive integrated sensors have been in rapid development and wide application.
The multi-functionalization of sensor is also one of its development direction. A typical example of so-called multi-functionalization, the monolithic silicon multidimensional force sensor developed in the research and development center at an American university can measure three line speed, three centrifugal acceleration (angular velocity) and three angular acceleration. The main components are the monolithic silicon structure composed of four cantilevers properly designed and installed in a substrate, the nine piezoresistive sensitive components properly arranged on each cantilever. Multi-functionalization can not only reduce production cost, size, and can effectively improve the performance index such as stability and reliability of sensors.
Multiple parameters can be measured simultaneously when integrating the sensing elements with different functions but also the measurement results of these parameters can be comprehensively treated and evaluated to reflect the overall state of the system under test. Can also be seen from above that integration brings many new opportunities to solid-state sensor but also it is the foundation of multi-functionalization.
Due to the combination of sensors and microprocessors, the sensors not only have detection function but also artificial intelligence such as information processing, logical judgment, self-diagnosis and "thinking", which is called sensor intelligence. By means of semiconductor integrated technology, a large-scale integrated intelligent sensor is produced when the sensor part and signal preprocessing circuit, input and output interfaces and microprocessor are fabricated on the same chip. So to say that intelligent sensors is the product of sensor technology combined with large scale integrated circuit and its realization will depend on the improvement and development of sensor technology and the technological level of semiconductor integration. Such sensors have the advantages of multi-function, high performance, small size, suitable for mass production and ease of use. It is safe to say that it is one of the important directions for the development of sensors.
3. Development of new materials
Sensor material is the important foundation for sensor technology and important support of sensor technology upgrading. With the advancement of material science, sensor technology is becoming more mature with more growing kinds. In addition to the early used semiconductor and ceramic materials, the development of optical fiber and superconducting materials provides a material basis for the development of sensor. For example, modern sensors such as infrared sensors, laser sensors, fiber optic sensors have been developed according to the characteristics of many semiconductor materials liable to miniaturization, integration, multi-functionalization and intelligence as well as semiconductor photo-thermal detectors with high sensitivity, high precision and non-contact; Sensitive materials such as ceramic materials and organic materials have been developed rapidly. They can be sintered with high precision molding mixing raw materials using different formulations based on precise blending chemical compositions to form sensitive materials which have identification function to one or certain types of gas for making new gas sensors. In addition, organic polymer sensitive materials are new type of sensitive materials which have received great concern in recent years with utilization potentiality and can be made into thermosensitive, photosensitive, gas-sensitive, humidity-sensitive, force-sensitive, ion-sensitive and bio-sensitive sensors. The continuous development of sensor technologies have also promoted the development of newer materials, such as nano- materials. U.S. NRC has developed nano- ZrO2 gas sensors to control exhaust emissions of motor vehicle with perfect effects of purifying environment and broader application prospect. The sensors produced with nanomaterials have huge interface and can provide a lot of gas channels with small on-resistance so they are beneficial to the miniaturization of sensors. With continuous progress of science and technology, there will be more new materials.
4. Adoption of new technology
The development of new sensors is inseparable from the adoption of new technology. New technology has a wide range of meaning. It mainly refers to the microfabrication technique particularly correlated to the development of new sensor. This technique is also known as micro-machining process technology and develops together with integrated circuit technology in recent years. It is the microelectronic processing technology used for ion beam, electron beam, molecular beam, laser beam and chemical etching and currently widely used in the field of sensor, such as sputtering, vapor deposition, plasma etching, chemical vapor deposition (CVD), epitaxy, diffusion, etching and photoetching. So far a large number of sensors have been put into production and used in the world using the above-mentioned technology.
5. Intelligent material
Intelligent materials refers to the man-made materials which are developed with the design and control of physical, chemical, mechanical, electrical parameters of materials so they have the biological characteristics or are superior to the properties of biological materials. Some people think that the materials with the following functions can be called intelligent materials: adaptive function to the environment through judgment; self-diagnostic function; self-healing function; self-enhancement function (or time base function).
The most prominent feature of biological materials is their time base function, so this type of sensor has the differential characteristic sensitive to variational portion. On the contrary, if it is in an environment for long time and accustomed to this environment, its sensitivity will decrease. Generally, it can adapt to the environment and adjust its sensitivity. In addition to biological materials, the most striking intelligent materials are the polymer of shape memory alloy, shape memory ceramic and shape memory. The exploration of intelligent materials is just beginning and we believe there will be a great development in the near future.